Patents/Inventors

Karthik Narayanan Balakrishnan

SingaporeSG1 patent

2 Patents

US124379992025
Methods and Apparatus for Mask Patterning Debris Removal
APPLIED MATERIALS, Inc.
0 cites
US120681592024
Methods and Apparatus for Mask Patterning Debris Removal
APPLIED MATERIALS, Inc.
0 cites