23 Patents
- US125867572026Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System
Lam Research Corporation
0 cites - US125818752026Processing Tool Capable for Forming Carbon Layers on Substrates
LAM RESEARCH CORPORATION
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- US123946012025Impedance Transformation in Radio-frequency-assisted Plasma Generation
Lam Research Corporation
0 cites - US123717812025In Situ Protective Coating of Chamber Components for Semiconductor Processing
Lam Research Corporation
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- US123225822025Anomalous Plasma Event Detection and Mitigation in Semiconductor Processing
Lam Research Corporation
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- US123082162025Mechanical Suppression of Parasitic Plasma in Substrate Processing Chamber
Lam Research Corporation
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- US122179392025RF Tuning Systems Including Tuning Circuits Having Impedances for Setting and Adjusting Parameters of Electrodes in Electrostatic Chucks
Lam Research Corporation
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- US119842982024Impedance Transformation in Radio-frequency-assisted Plasma Generation
Lam Research Corporation
0 cites - US118624352024Mechanical Suppression of Parasitic Plasma in Substrate Processing Chamber
Lam Research Corporation
0 cites - US118374432023Showerhead Faceplate Having Flow Apertures Configured for Hollow Cathode Discharge Suppression
Lam Research Corporation
0 cites - US117252822023Suppression of Parasitic Deposition in a Substrate Processing System by Suppressing Precursor Flow and Plasma Outside of Substrate Region
Novellus Systems, Inc.
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- US116211502023Mechanical Suppression of Parasitic Plasma in Substrate Processing Chamber
Lam Research Corporation
0 cites - US115943972023Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System
Lam Research Corporation
0 cites - US115574602023Radio Frequency (RF) Signal Source Supplying RF Plasma Generator and Remote Plasma Generator
Lam Research Corporation
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