3 Patents
- US123797202025Common Terminal Heater for Ceramic Pedestals Used in Semiconductor for Fabrication
Lam Research Corporation
0 cites - US119553662024Pad Raising Mechanism in Wafer Positioning Pedestal for Semiconductor Processing
Lam Research Corporation
0 cites - US117680112023Apparatus for Thermal Control of Tubing Assembly and Associated Methods
Lam Research Corporation
0 cites