Kapu Sirish Reddy

5 Patents

• US126010572026

  Soaking and ESC Clamping Sequence for High Bow Substrates

  Lam Research Corporation

  0 cites
• US125884752026

  High Selectivity Doped Hardmask Films

  Lam Research Corporation

  0 cites
• US122665352025

  Mask Encapsulation to Prevent Degradation During Fabrication of High Aspect Ratio Features

  LAM RESEARH CORPORATION

  0 cites
• US122495142025

  Carbon Based Depositions Used for Critical Dimension Control During High Aspect Ratio Feature Etches and for Forming Protective Layers

  Lam Research Corporation

  0 cites
• US118697702024

  Selective Deposition of Etch-stop Layer for Enhanced Patterning

  Lam Research Corporation

  0 cites