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Inventors
Kang Sul Kim
Hwaseong-si
KR
4 patents
5 Patents
US12472596
2025
Support Unit and Substrate Treating Apparatus Including the Same
SEMES CO., Ltd.
0 cites
US12465956
2025
Substrate Processing Apparatus and Substrate Processing Method
SEMES CO., Ltd.
0 cites
US12451371
2025
Substrate Processing Apparatus and Substrate Processing Method
Semes Co., Ltd.
0 cites
US12412754
2025
Liquid Supply Apparatus and Substrate Treatment Apparatus Including the Same
SEMES CO., Ltd.
0 cites
US12159793
2024
Substrate Treating Apparatus and Substrate Treating Method
SEMES CO., Ltd.
0 cites