Patents/Inventors

Kang Sub Yim

Palo Alto, CAUS6 patents

6 Patents

US121989252025
Systems and Methods for Depositing Low-k Dielectric Films
Applied Materials, Inc.
0 cites
US121192232024
Single Precursor Low-k Film Deposition and UV Cure for Advanced Technology Node
Applied Materials, Inc.
0 cites
US116211622023
Systems and Methods for Forming Uv-cured Low-κ Dielectric Films
Applied Materials, Inc.
0 cites
US116004862023
Systems and Methods for Depositing Low-κdielectric Films
Applied Materials, Inc.
0 cites
US115944092023
Systems and Methods for Depositing Low-k Dielectric Films
Applied Materials, Inc.
0 cites
US115726222023
Systems and Methods for Cleaning Low-k Deposition Chambers
Applied Materials, Inc.
0 cites