5 Patents
- US125884342026Methods for Forming Dielectric Materials with Selected Polarization for Semiconductor Devices
Tokyo Electron Limited
0 cites - US124943622025Atomic Layer Deposition of Aluminum Oxide Films for Semiconductor Devices Using an Aluminum Alkoxide Oxidizer
Tokyo Electron Limited
0 cites - 0 cites
- US118043762023Method for Mitigating Lateral Film Growth in Area Selective Deposition
Tokyo Electron Limited
0 cites - US116580662023Method for Reducing Lateral Film Formation in Area Selective Deposition
Tokyo Electron Limited
0 cites