15 Patents
- US125884692026Bipolar Electrostatic Chuck Electrode with Self-induced DC Voltage
Applied Materials, Inc.
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- US122241562025Microwave Plasma Source for Spatial Plasma Enhanced Atomic Layer Deposition (PE-ALD) Processing Tool
Applied Materials, Inc.
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- US119086622024Device and Method for Tuning Plasma Distribution Using Phase Control
Applied Materials, Inc.
0 cites - US118238712023Microwave Plasma Source for Spatial Plasma Enhanced Atomic Layer Deposition (PE-ALD) Processing Tool
Applied Materials, Inc.
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