Kai Tak Lam

8 Patents

• US124329542025

  Semiconductor Device Structure with Fin and Method for Forming the Same

  Taiwan Semiconductor Manufacturing Company, Ltd.

  0 cites
• US123728862025

  Acoustic Particle Deflection in Lithography Tool

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

  0 cites
• US121745452024

  System and Method for Performing Extreme Ultraviolet Photolithography Processes

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites
• US120965442024

  Lithography Thermal Control

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites
• US120877142024

  Reduction of Cracks in Passivation Layer

  TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.

  0 cites
• US118222592023

  Acoustic Particle Deflection in Lithography Tool

  Taiwan Semiconductor Manufacturing Company, Ltd.

  0 cites
• US117684372023

  System and Method for Performing Extreme Ultraviolet Photolithography Processes

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites
• US116475782023

  Lithography Thermal Control

  TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.

  0 cites