Patents/Inventors

Kai Schillinger

FreiburgDE3 patents

3 Patents

US119159222024
Silicon Wafer for an Electronic Component and Method for the Production Thereof
Nexwafe GmbH
0 cites
US118624622024
Method and Apparatus for the Continuous Vapor Deposition of Silicon on Substrates
Nexwafe GmbH
0 cites
US115603162023
Process and Apparatus for Removal of Impurities from Chlorosilanes
Nexwafe GmbH
0 cites