Patents/Inventors

Kae Kumagai

MiyagiJP8 patents

7 Patents

US125123252025
Etching Method and Etching Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124826512025
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123680272025
Substrate Processing Method and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US120740092024
Apparatus for Processing a Substrate
TOKYO ELECTRON LIMITED
0 cites
US120209042024
Apparatus for Processing a Substrate
TOKYO ELECTRON LIMITED
0 cites
US119962962024
Substrate Processing Method and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US115453552023
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites