Patents/Inventors

Juwen Gao

San Jose, CAUS6 patents

6 Patents

US124446512025
Tungsten Feature Fill with Nucleation Inhibition
Novellus Systems, Inc.
0 cites
US120606392024
Rapid Flush Purging During Atomic Layer Deposition
Lam Research Corporation
0 cites
US120149282024
Multi-layer Feature Fill
Lam Research Corporation
0 cites
US119729522024
Atomic Layer Deposition on 3D NAND Structures
Lam Research Corporation
0 cites
US119012272024
Feature Fill with Nucleation Inhibition
Lam Research Corporation
0 cites
US116705162023
Metal-containing Passivation for High Aspect Ratio Etch
Lam Research Corporation
0 cites