Jurgen Van Soest

4 Patents

• US122886632025

  Charged Particle Source Module

  ASML Netherlands B.V.

  0 cites
• US120280002024

  Object Table Comprising an Electrostatic Clamp

  ASML Netherlands B.V.

  0 cites
• US116375122023

  Object Table Comprising an Electrostatic Clamp

  ASML Netherlands B.V.

  0 cites
• US115574552023

  Charged Particle Source Module

  ASML Netherlands B.V.

  0 cites