Patents/Inventors

Junnosuke Taguchi

IwateJP6 patents

7 Patents

US123851322025
Substrate Processing Apparatus and Substrate Processing Method
Tokyo Electron Limited
0 cites
US122725902025
Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US122550922025
Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US122179982025
Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US118850032024
Rotational Drive Device, Substrate Processing Apparatus, and Rotational Driving Method
TOKYO ELECTRON LIMITED
0 cites
US117658792023
Substrate Processing Apparatus and Monitoring Method
Tokyo Electron Limited
0 cites
US116709992023
Magnetic Coupling Device
TOKYO ELECTRON LIMITED
0 cites