Junnosuke Maki

4 Patents

• US126107832026

  Substrate Transfer Apparatus, State Determination Method, and Computer Storage Medium

  Tokyo Electron Limited

  0 cites
• US124313742025

  Information Acquisition System and Information Acquisition Method

  TOKYO ELECTRON LIMITED

  0 cites
• US121762272024

  State Determination Device, State Determination Method, and Computer-readable Recording Medium

  TOKYO ELECTRON LIMITED

  0 cites
• US119202402024

  Substrate Processing Apparatus, State Determination Method and Computer-readable Recording Medium

  TOKYO ELECTRON LIMITED

  0 cites