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Inventors
Junichiro Kozaki
Kyoto
JP
2 patents
3 Patents
US12158155
2024
Estimation Device, Vacuum Valve, and Vacuum Pump
SHIMADZU CORPORATION
0 cites
US11809205
2023
Estimator and Vacuum Valve
SHIMADZU CORPORATION
0 cites
US11551952
2023
Vacuum Valve, Method of Controlling Vacuum Valve, and Estimation Device
Shimadzu Corporation
0 cites