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Inventors
Junichi Kanehara
Eindhoven
NL
8 patents
4 Patents
US12618667
2026
Measurement Apparatus
ASML NETHERLANDS B.V.
0 cites
US12265337
2025
Exposure Apparatus
ASML NETHERLANDS B.V.
0 cites
US12147167
2024
Imprint Apparatus with Movable Stages
ASML Netherlands B.V.
0 cites
US11874103
2024
Measurement Apparatus
ASML NETHERLANDS B.V.
0 cites