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Inventors
Jung-yu Li
Taichung
TW
2 patents
3 Patents
US12128522
2024
Polishing Head, Chemical-mechanical Polishing System and Method for Polishing Substrate
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US12070833
2024
Method of Using Polishing Pad
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US11691243
2023
Method of Using Polishing Pad
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites