Patents/Inventors

Jun Yamawaku

NirasakiJP5 patents

5 Patents

US125371702026
Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124826352025
Plasma Processing Device, and Plasma Processing Method
Tokyo Electron Limited
0 cites
US120209002024
Plasma Processing Device, and Plasma Processing Method
Tokyo Electron Limited
0 cites
US119357272024
Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US115784072023
Film-forming Apparatus and Film-forming Method
TOKYO ELECTRON LIMITED
0 cites