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Inventors
Jun Won Seo
Anseong-si
KR
4 patents
3 Patents
US12550672
2026
Susceptor and Manufacturing Method Therefor
Mico Ceramics Ltd.
0 cites
US12538749
2026
Electrostatic Chuck Heater and Manufacturing Method Therefor
MICO CERAMICS Ltd.
0 cites
US11908725
2024
Electrostatic Chuck Heater and Manufacturing Method Therefor
MICO CERAMICS Ltd.
0 cites