Patents/Inventors

Jun Shinagawa

Fremont, CAUS5 patents

6 Patents

US124008882025
Data Fusion of Multiple Sensors
Tokyo Electron Limited
0 cites
US123004772025
Autonomous Operation of Plasma Processing Tool
Tokyo Electron Limited
0 cites
US121121072024
Virtual Metrology for Wafer Result Prediction
Tokyo Electron Limited
0 cites
US120323552024
Virtual Metrology Model Based Seasoning Optimization
Tokyo Electron Limited
0 cites
US118697562024
Virtual Metrology Enhanced Plasma Process Optimization Method
Tokyo Electron Limited
0 cites
US116690792023
Tool Health Monitoring and Classifications with Virtual Metrology and Incoming Wafer Monitoring Enhancements
Tokyo Electron Limited
0 cites