Jun-feng Lu

3 Patents

• US123476872025

  Etch Rate Modulation of Finfet Through High-temperature Ion Implantation

  Applied Materials, Inc.

  0 cites
• US119423242024

  Method for BEOL Metal to Dielectric Adhesion

  Applied Materials, Inc.

  0 cites
• US118759952024

  Techniques and Apparatus for Anisotropic Stress Compensation in Substrates Using Ion Implantation

  Applied Materials, Inc.

  0 cites