3 Patents
- US125387482026Ceramic Joined Body, Electrostatic Chucking Device, and Method for Producing Ceramic Joined Body
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites - US124244752025Ceramic Joined Body, Electrostatic Chuck Device, and Method for Producing Ceramic Joined Body
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites - US119903622024Composite Sintered Body, Electrostatic Chuck Member, Electrostatic Chuck Device, and Method for Manufacturing Composite Sintered Body
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites