Patents/Inventors

Jumpei Uefuji

FukuokaJP7 patents

8 Patents

US125435362026
Electrostatic Chuck
TOTO Ltd.
0 cites
US123951012025
Electrostatic Chuck
Toto Ltd.
0 cites
US123745742025
Electrostatic Chuck
Toto Ltd.
0 cites
US123410492025
Electrostatic Chuck Including a Heater Element with Mutiple Heating Zones
Toto Ltd.
0 cites
US123410502025
Electrostatic Chuck
Toto Ltd.
0 cites
US118307552023
Electrostatic Chuck and Semiconductor Manufacturing Apparatus
Toto Ltd.
0 cites
US117768362023
Electrostatic Chuck and Semiconductor Manufacturing Apparatus
Toto Ltd.
0 cites
US117568202023
Electrostatic Chuck and Semiconductor Manufacturing Apparatus
Toto Ltd.
0 cites