7 Patents
- US124943452025Pulsing RF Coils of a Plasma Chamber in Reverse Synchronization
Lam Research Corporation
0 cites - US122834612025Systems and Methods for Achieving Peak Ion Energy Enhancement with a Low Angular Spread
Lam Research Corporation
0 cites - US121192322024Etching Isolation Features and Dense Features Within a Substrate
Lam Research Corporation
0 cites - US120681312024Multi-level Parameter and Frequency Pulsing with a Low Angular Spread
Lam Research Corporation
0 cites - US120573192024Selective Silicon Dioxide Removal Using Low Pressure Low Bias Deuterium Plasma
Lam Research Corporation
0 cites - US119159122024Systems and Methods for Achieving Peak Ion Energy Enhancement with a Low Angular Spread
Lam Research Corporation
0 cites - US115690672023Systems and Methods for Achieving Peak Ion Energy Enhancement with a Low Angular Spread
Lam Research Corporation
0 cites