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Inventors
Julian Proelss
Allschwil
CH
2 patents
3 Patents
US12351737
2025
Chemical Mechanical Polishing of Substrates Containing Copper and Ruthenium
BASF SE
0 cites
US11993729
2024
Chemical Mechanical Polishing Composition
BASF SE
0 cites
US11725117
2023
Chemical Mechanical Polishing of Substrates Containing Copper and Ruthenium
BASF SE
0 cites