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Inventors
Juill Lee
Cheonan-si
KR
3 patents
4 Patents
US12107000
2024
Substrate Support Assembly and Substrate Processing Device Including the Same
ASM IP Holding B.V.
0 cites
US11993843
2024
Substrate Processing Apparatus
ASM IP Holding B.V.
0 cites
US11996304
2024
Substrate Processing Device
ASM IP Holding B.V.
0 cites
US11664245
2023
Substrate Processing Device
ASM IP Holding B.V.
0 cites