Patents/Inventors

Juhee Yeo

SuwonKR2 patents

3 Patents

US122725602025
Selective Removal of Metal Oxide Hard Masks
ENTEGRIS, Inc.
0 cites
US121521872024
Nitride Etchant Composition and Method
ENTEGRIS, Inc.
0 cites
US120125402024
Compositions and Methods for Selectively Etching Silicon Nitride Films
ENTEGRIS, Inc.
0 cites