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Inventors
Jubong Lee
Hwaseong-si
KR
1 patent
2 Patents
US12472541
2025
Apparatus for Cleaning a Bowl and a Photoresist (PR) Coating System Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US12145233
2024
Conditioning Disk Replacement Apparatus and Method
Samsung Electronics Co., Ltd.
0 cites