Ju Yong Jang

3 Patents

• US123157082025

  Apparatus for Treating Substrate

  SEMES CO., Ltd.

  0 cites
• US121815042024

  Apparatus and Method for Inspecting Electrostatic Chuck

  SEMES CO., Ltd.

  0 cites
• US119643092024

  Substrate Treatment Apparatus and Method

  SEMES CO., Ltd.

  0 cites