Jr-sheng Chen

6 Patents

• US126205622026

  Focus Ring for a Plasma-based Semiconductor Processing Tool

  Taiwan Semiconductor Manufacturing Company, Ltd.

  0 cites
• US124630162025

  Devices and Methods for Controlling Wafer Uniformity in Plasma-based Process

  Taiwan Semiconductor Manufacturing Company, Ltd.

  0 cites
• US124127342025

  Baffle Plate for Controlling Wafer Uniformity and Methods for Making the Same

  Taiwan Semiconductor Manufacturing Company, Ltd.

  0 cites
• US120625232024

  Methods and Systems for Cooling Plasma Treatment Components

  Taiwan Semiconductor Manufacturing Company, Ltd.

  0 cites
• US117696522023

  Devices and Methods for Controlling Wafer Uniformity in Plasma-based Process

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites
• US116159462023

  Baffle Plate for Controlling Wafer Uniformity and Methods for Making the Same

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites