3 Patents
- US123126892025Large-area High-density Plasma Processing Chamber for Flat Panel Displays
APPLIED MATERIALS, Inc.
0 cites - US122241562025Microwave Plasma Source for Spatial Plasma Enhanced Atomic Layer Deposition (PE-ALD) Processing Tool
Applied Materials, Inc.
0 cites - US118238712023Microwave Plasma Source for Spatial Plasma Enhanced Atomic Layer Deposition (PE-ALD) Processing Tool
Applied Materials, Inc.
0 cites