Patents/Inventors

Joshua Mark Lukens

San Diego, CAUS3 patents

4 Patents

US124529862025
Nozzle Apparatus
ASML Netherlands B.V.
0 cites
US123392142025
Apparatus for and Method of Monitoring Droplets in a Droplet Stream
ASML Netherlands B.V.
0 cites
US119632852024
Target Material Control in an EUV Light Source
ASML Netherlands B.V.
0 cites
US116901592023
Apparatus and Method for Extending Target Material Delivery System Lifetime
ASML Netherlands B.V.
0 cites