5 Patents
- US124826282025Chlorine-containing Precursors for Ion Implantation Systems and Related Methods
ENTEGRIS, Inc.
0 cites - US124221002025Gas Storage and Dispensing Container and a Method of Dispensing Therefrom
ENTEGRIS, Inc.
0 cites - 0 cites
- US118279732023Germanium Tetraflouride and Hydrogen Mixtures for an Ion Implantation System
ENTEGRIS, Inc.
0 cites - 0 cites