Patents/Inventors

Joseph R. Abel

West Linn, ORUS15 patents

13 Patents

US125989302026
Conformal Thermal CVD with Controlled Film Properties and High Deposition Rate
Lam Research Corporation
0 cites
US124736332025
Plasma Enhanced Atomic Layer Deposition of Silicon-containing Films
Lam Research Corporation
0 cites
US124313492025
In-situ Control of Film Properties During Atomic Layer Deposition
Lam Research Corporation
0 cites
US124179432025
Reducing Intralevel Capacitance in Semiconductor Devices
Lam Research Corporation
0 cites
US124127422025
Impurity Reduction in Silicon-containing Films
Lam Research Corporation
0 cites
US124008802025
Apparatuses for Uniform Fluid Delivery in a Multi-station Semiconductor Processing Chamber
Lam Research Corporation
0 cites
US123226192025
Dynamic Process Control in Semiconductor Manufacturing
Lam Research Corporation
0 cites
US122886852025
Modifying Hydrophobicity of a Wafer Surface Using an Organosilicon Precursor
Lam Research Corporation
0 cites
US122527822025
In-situ PECVD Cap Layer
Lam Research Corporation
0 cites
US121257052024
Method for Providing Doped Silicon Using a Diffusion Barrier Layer
LAM RESEARCH CORPORATION
0 cites
US120875742024
Oxidative Conversion in Atomic Layer Deposition Processes
Lam Research Corporation
0 cites
US120209232024
Low-κ ALD Gap-fill Methods and Material
Lam Research Corporation
0 cites
US116519632023
Method of Improving Deposition Induced CD Imbalance Using Spatially Selective Ashing of Carbon Based Film
Lam Research Corporation
0 cites