Patents/Inventors

Joseph Aubuchon

San Jose, CAUS27 patents

22 Patents

US125903632026
Apparatus for Single Chamber Deposition and Etch
Applied Materials, Inc.
0 cites
US125842192026
Methods for Controlling Pulse Shape in ALD Processes
Applied Materials, Inc.
0 cites
US125403982026
Showerhead Pumping Geometry for Precursor Containment
Applied Materials, Inc.
0 cites
USD11039482025
Gas Distribution Plate
Applied Materials, Inc.
0 cites
USD11040862025
Gas Distribution Plate
Applied Materials, Inc.
0 cites
US124697392025
Methods of Operating a Spatial Deposition Tool
Applied Materials, Inc.
0 cites
US124420802025
Plasma Showerhead Assembly and Method of Reducing Defects
Applied Materials, Inc.
0 cites
US123052832025
Dithering or Dynamic Offsets for Improved Uniformity
Applied Materials, Inc.
0 cites
US121192212024
PEALD Nitride Films
Applied Materials, Inc.
0 cites
US120778612024
Dithering or Dynamic Offsets for Improved Uniformity
Applied Materials, Inc.
0 cites
US120606382024
Deposition Apparatus and Methods Using Staggered Pumping Locations
Applied Materials, Inc.
0 cites
US119786252024
Methods of Forming Metal Nitride Films
Applied Materials, Inc.
0 cites
US119232332024
Dual-function Wafer Backside Pressure Control and Edge Purge
APPLIED MATERIALS, Inc.
0 cites
US118942572024
Single Wafer Processing Environments with Spatial Separation
Applied Materials, Inc.
0 cites
US118238702023
PEALD Titanium Nitride with Direct Microwave Plasma
APPLIED MATERIALS, Inc.
0 cites
US117610832023
Methods for Controlling a Flow Pulse Shape
APPLIED MATERIALS, Inc.
0 cites
US117135082023
Apparatus and Methods for Improving Chemical Utilization Rate in Deposition Process
Applied Materials, Inc.
0 cites
US116262812023
PEALD Nitride Films
APPLIED MATERIALS, Inc.
0 cites
US115838162023
Gas Distribution Plate for Thermal Deposition
APPLIED MATERIALS, Inc.
0 cites
US115849932023
Thermally Uniform Deposition Station
APPLIED MATERIALS, Inc.
0 cites
US115867892023
Machine Learning Based Smart Process Recipe Builder to Improve Azimuthal Flow and Thickness Uniformity
APPLIED MATERIALS, Inc.
0 cites
US115606242023
Precursor Delivery System
Applied Materials, Inc.
0 cites