Patents/Inventors

Jongwoo Sun

Hwaseong-siKR7 patents

8 Patents

US123157032025
Plasma Processing Apparatus and Methods of Manufacturing Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122116722025
Apparatus and Method for Plasma Etching
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US120875542024
Substrate Treating Apparatus and Substrate Treating System Having the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US120681402024
Method and System for Monitoring Substrate Processing Apparatus
Samsung Electronics Co., Ltd.
0 cites
US119843042024
Apparatus and Method for Plasma Etching
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US119292392024
Plasma Processing Apparatus and Semiconductor Device Manufacturing Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US118624402024
Semiconductor Processing Equipment Including Electrostatic Chuck for Plasma Processing
Samsung Electronics Co., Ltd.
0 cites
US117156282023
Method of Forming Plasma Processing Apparatus, Related Apparatus, and Method of Forming Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites