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Inventors
Jongwan Choi
Hwaseong-si
KR
1 patent
2 Patents
US11823866
2023
Thin Film Forming Method
ASM IP Holding B.V.
0 cites
US11676812
2023
Method for Forming Silicon Nitride Film Selectively on Top/bottom Portions
ASM IP Holding B.V.
0 cites