Patents/Inventors

Jongju Park

Hwaseong-siKR4 patents

5 Patents

US123139792025
Correcting Apparatus of Extreme Ultraviolet (EUV) Photomask and Correcting Method of EUV Photomask
Samsung Electronics Co., Ltd.
0 cites
US122596472025
Method of Manufacturing Extreme Ultraviolet (EUV) Photomask and Method and Apparatus for Correcting EUV Photomask
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US119340922024
Method of Annealing Reflective Photomask by Using Laser
Samsung Electronics Co., Ltd.
0 cites
US118525832023
Apparatus and Method for Measuring Phase of Extreme Ultraviolet (EUV) Mask and Method of Fabricating EUV Mask Including the Method
Samsung Electronics Co., Ltd.
0 cites
US116353712023
Apparatus and Method for Measuring Phase of Extreme Ultraviolet (EUV) Mask and Method of Fabricating EUV Mask Including the Method
Samsung Electronics Co., Ltd.
0 cites