6 Patents
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- US125312062026Electrostatic Chuck with Multiple Radio Frequency Meshes to Control Plasma Uniformity
APPLIED MATERIALS, Inc.
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- US121365362024Electrostatic Chuck with Multiple Radio Frequency Meshes to Control Plasma Uniformity
APPLIED MATERIALS, Inc.
0 cites - US119086622024Device and Method for Tuning Plasma Distribution Using Phase Control
Applied Materials, Inc.
0 cites