5 Patents
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- US121547692024Window for Plasma OES Diagnosis, and Plasma Apparatus Using Same
KOREA INSTITUTE OF FUSION ENERGY
0 cites - US120247742024Apparatus for Supplying Gas and Apparatus for Processing Substrate Using the Same
JUSUNG ENGINEERING CO., Ltd.
0 cites - US116519412023Apparatus for Distributing Gas, and Apparatus and Method for Processing Substrate
JUSUNG ENGINEERING CO., Ltd.
0 cites