3 Patents
- US117798712023Exhaust Module for Wafer Baking Apparatus and Wafer Processing System Having the Same
XIA TAI XIN SEMICONDUCTOR (QING DAO) Ltd.
0 cites - US115811872023Method of Heating SOC Film on Wafer by Electromagnetic Wave Generator and Heating Apparatus Using the Same
XIA TAI XIN SEMICONDUCTOR (QING DAO) Ltd.
0 cites - US115453592023Method of Heating SOC Film on Wafer by Electromagnetic Wave Generator and Heating Apparatus Using the Same
XIA TAI XIN SEMICONDUCTOR (QING DAO) Ltd.
0 cites