Patents/Inventors

Jonathan Madsen

Los Altos, CAUS6 patents

6 Patents

US123796692025
Massive Overlay Metrology Sampling with Multiple Measurement Columns
KLA Corporation
0 cites
US118993752024
Massive Overlay Metrology Sampling with Multiple Measurement Columns
KLA Corporation
0 cites
US118801422024
Self-calibrating Overlay Metrology
KLA Corporation
0 cites
US116040632023
Self-calibrated Overlay Metrology Using a Skew Training Sample
KLA Corporation
0 cites
US116044202023
Self-calibrating Overlay Metrology
KLA Corporation
0 cites
US115622892023
Loosely-coupled Inspection and Metrology System for High-volume Production Process Monitoring
KLA Corporation
0 cites