4 Patents
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- US122725582025Selective and Isotropic Etch of Silicon Over Silicon-germanium Alloys and Dielectrics; via New Chemistry and Surface Modification
Tokyo Electron Limited
0 cites - US120274882024Methods of Forming Stacked Integrated Circuits Using Selective Thermal Atomic Layer Deposition on Conductive Contacts and Structures Formed Using the Same
Georgia Tech Research Corporation
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