Patents/Inventors

Jon Mcchesney

Fremont, CAUS6 patents

7 Patents

US122371542025
Bottom and Middle Edge Rings
LAM RESEARCH CORPORATION
0 cites
US122304822025
Moveable Edge Ring Designs
LAM RESEARCH CORPORATION
0 cites
US121835542024
Bottom and Middle Edge Rings
LAM RESEARCH CORPORATION
0 cites
US120274102024
Edge Ring Arrangement with Moveable Edge Rings
Lam Research Corporation
0 cites
US118878192024
Systems for Cooling RF Heated Chamber Components
Lam Research Corporation
0 cites
US116927322023
Air Cooled Faraday Shield and Methods for Using the Same
Lam Research Corporation
0 cites
US116055462023
Moveable Edge Coupling Ring for Edge Process Control During Semiconductor Wafer Processing
Lam Research Corporation
0 cites