Patents/Inventors

Joji Takayoshi

MiyagiJP9 patents

7 Patents

US125623522026
Prediction Method and Information Processing Apparatus for Predicting the Process Result in a Plasma Etching Process
TOKYO ELECTRON LIMITED
0 cites
US125487442026
Plasma Processing Apparatus, Control Method, and Storage Medium for Suppressing Deterioration Effects from Wear of an Edge Ring
TOKYO ELECTRON LIMITED
0 cites
US125418372026
Etching Processing System, Method of Predicting Etching Quality, and Non-transitory Storage Medium of Etching Quality Prediction Storing a Program Causing a Computer to Implement a Prediction
Tokyo Electron Limited
0 cites
US122886782025
Substrate Processing Apparatus and Substrate Transfer Position Adjustment Method
TOKYO ELECTRON LIMITED
0 cites
US120338382024
Plasma Processing Apparatus and Wear Amount Measurement Method
TOKYO ELECTRON LIMITED
0 cites
US117053742023
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US116825432023
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites