Patents/Inventors

John Szilagyi

Livermore, CAUS1 patent

2 Patents

US120338452024
Laser-sustained Plasma Source Based on Colliding Liquid Jets
KLA Corporation
0 cites
US118441722023
System and Method for Vacuum Ultraviolet Lamp Assisted Ignition of Oxygen-containing Laser Sustained Plasma Sources
KLA Corporation
0 cites