John Stephen Drewery

8 Patents

• US125803252026

  Phased Array Antennas and Methods for Controlling Uniformity in Processing a Substrate

  Lam Research Corporation

  0 cites
• US125735892026

  Synchronization of RF Generators

  Lam Research Corporation

  0 cites
• US124068722025

  Semiconductor Processing Chamber with Dual-lift Mechanism for Edge Ring Elevation Management

  Lam Research Corporation

  0 cites
• US123680572025

  Enhanced Closed Loop Gas Based Heat Exchange

  Lam Research Corporation

  0 cites
• US120875612024

  Vacuum Pump Protection Against Deposition Byproduct Buildup

  Lam Research Corporation

  0 cites
• US120464502024

  Synchronization of RF Generators

  Lam Research Corporation

  0 cites
• US117106232023

  Vacuum Pump Protection Against Deposition Byproduct Buildup

  Lam Research Corporation

  0 cites
• US116767982023

  Cooling for a Plasma-based Reactor

  Lam Research Corporation

  0 cites