John Patrick Holland

7 Patents

• US124127362025

  Methods and Systems for Managing Byproduct Material Accumulation During Plasma-based Semiconductor Wafer Fabrication Process

  Lam Research Corporation

  0 cites
• US123879092025

  Low Frequency RF Generator and Associated Electrostatic Chuck

  Lam Research Corporation

  0 cites
• US123621592025

  Systems and Methods for Controlling a Plasma Sheath Characteristic

  Lam Research Corporation

  0 cites
• US122372012025

  Electrostatic Chucks with Coolant Gas Zones and Corresponding Groove and Monopolar Electrostatic Clamping Electrode Patterns

  Lam Research Corporation

  0 cites
• US119423512024

  Electrostatic Chucks with Coolant Gas Zones and Corresponding Groove and Monopolar Electrostatic Clamping Electrode Patterns

  Lam Research Corporation

  0 cites
• US116642622023

  Electrostatic Chucks with Coolant Gas Zones and Corresponding Groove and Monopolar Electrostatic Clamping Electrode Patterns

  Lam Research Corporation

  0 cites
• US116519912023

  Electrostatic Chuck Design for Cooling-gas Light-up Prevention

  Lam Research Corporation

  0 cites