Patents/Inventors

John Kevin Shugrue

Phoenix, AZUS8 patents

9 Patents

US122760232025
Showerhead Assembly for Distributing a Gas Within a Reaction Chamber
ASM IP Holding B.V.
0 cites
US122345522025
Semiconductor Processing Apparatus and Methods for Monitoring and Controlling a Semiconductor Processing Apparatus
ASM IP Holding B.V.
0 cites
US122179792025
Temperature Controlled Substrate Carrier and Polishing Components
Axus Technology, LLC
0 cites
US121452362024
Containment and Exhaust System for Substrate Polishing Components
Axus Technology, LLC
0 cites
US119396732024
Apparatus for Detecting or Monitoring for a Chemical Precursor in a High Temperature Environment
ASM IP Holding B.V.
0 cites
US118916932024
Systems and Methods for Controlling Vapor Phase Processing
ASM IP Holding B.V.
0 cites
US117955452023
Multiple Temperature Range Susceptor, Assembly, Reactor and System Including the Susceptor, and Methods of Using the Same
ASM IP Holding B.V.
0 cites
US116294062023
Semiconductor Processing Apparatus Comprising One or More Pyrometers for Measuring a Temperature of a Substrate During Transfer of the Substrate
ASM IP Holding B.V.
0 cites
US116263132023
Apparatus and Methods for Isolating a Reaction Chamber from a Loading Chamber Resulting in Reduced Contamination
ASM IP HOLDING B.V.
0 cites